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1

Ion bombardment and ion-assisted etching in rf discharges /

Ion bombardment and ion-assisted etching in rf discharges /

por Manenschijn, Albert.
Publicado 1991.

Libro

2

$RMS 1993 : proceedings of the Fifth European Workshop on Refractory Metals and Silicides, Sint Michielsgestel, The Netherlands, March 29-31, 1993 /$

RMS 1993 : proceedings of the Fifth European Workshop on Refractory Metals and Silicides, Sint Michielsgestel, The Netherlands, March 29-31, 1993 /

por European Workshop on Refractory Metals and Silicides (5th : 1993 : Sint Michielsgestel, Netherlands)
Publicado 1993.

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