New trends in ion beam processing from ions and cluster ion beams to engineering issues : proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22-26, 1995 /
por: Symposium J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation (1995 : Strasbourg, France)
Publicado: (1996.)
