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BCCAB007593 |
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AR-BCCAB |
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|a MAM 1995 :
|b Proceedings of the First European Workshop on Materials for Advanced Metallization : Radebeul, Germany, March 19-22, 1995 /
|c guest editors, Thomas Gessner and Stefan E. Schulz.
|
260 |
# |
# |
|a Amsterdam :
|b North-Holland,
|c 1995.
|
300 |
# |
# |
|a 407 p. :
|b il., tablas ;
|c 26 cm.
|
504 |
# |
# |
|a Incluye referencias bibliográficas e índices.
|
111 |
2 |
# |
|a European Workshop on Materials for Advanced Metallization
|n (1st :
|d 1995 :
|c Radebeul, Germany)
|
700 |
1 |
# |
|a Gessner, Thomas.
|
700 |
1 |
# |
|a Schulz, Stefan E.
|
246 |
3 |
0 |
|a Proceedings of the First European Workshop on Materials for Advanced Metallization
|
246 |
3 |
0 |
|a Materials for Advanced Metallization
|
080 |
# |
# |
|a 666.76:061.3
|
650 |
# |
0 |
|a Integrated circuits
|x Ultra large scale integration
|x Materials
|v Congresses.
|
650 |
# |
0 |
|a Vapor-plating
|v Congresses.
|
650 |
# |
0 |
|a Electrochemical metallizing
|v Congresses.
|
049 |
# |
# |
|a AR5A
|
490 |
1 |
# |
|a Applied surface science 1995 ;
|v v. 91
|
040 |
# |
# |
|a RRR
|c RRR
|d OCL
|b spa
|d arbccab
|
500 |
# |
# |
|a "Former Workshop on Refractory Metals and Silicides."
|
942 |
# |
# |
|c BK
|
952 |
# |
# |
|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 007593_nuevo-0
|o APPL. SURF. SCI. 1995
|p 007593_nuevo-0
|t 1
|y BK
|