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| LEADER |
01220cam#a2200241ua#4500 |
| 008 |
850419s1985####ne#a#####b####100#0#eng#d |
| 005 |
20060731104850.0 |
| 001 |
BCCAB008849 |
| 003 |
AR-BCCAB |
| 245 |
1 |
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|a Ion implantation :
|b equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984 /
|c editors, J.F. Ziegler, R.L. Brown.
|
| 260 |
# |
# |
|a Amsterdam :
|b North-Holland,
|c 1985.
|
| 300 |
# |
# |
|a xiv, 451 p. :
|b il. ;
|c 27 cm.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas.
|
| 111 |
2 |
# |
|a International Conference on Ion Implantation: Equipment and Techniques
|n (5th :
|d 1984 :
|c Jeffersonville, Vt.)
|
| 700 |
1 |
# |
|a Ziegler, J. F.
|q (James F.)
|
| 700 |
1 |
# |
|a Brown, R. L.
|
| 080 |
# |
# |
|a 621.382:061.3
|
| 650 |
# |
0 |
|a Ion implantation
|v Congresses.
|
| 650 |
# |
0 |
|a Semiconductor doping
|v Congresses.
|
| 490 |
1 |
# |
|a Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms,
|v v. B6, nos. 1, 2
|x 0168-583X ;
|
| 040 |
# |
# |
|a CLU
|c CLU
|d OCL
|b spa
|d arbccab
|
| 942 |
# |
# |
|c BK
|
| 952 |
# |
# |
|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 008849_nuevo-0
|o NUCL. INSTRUM. METH. PHYS. RES. B 1984
|p 008849_nuevo-0
|t 1
|y BK
|
