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950710s1995####ne#a#####b####101#0#eng## |
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|a Ion implantation technology-94 :
|b proceedings of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13-17, 1994 /
|c editors, Salvatore Coffa ... [et al.].
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260 |
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|a Amsterdam ;
|a New York :
|b North-Holland,
|c 1995.
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300 |
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|a xvii, 1012 p. :
|b il. ;
|c 27 cm.
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020 |
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|a 0444821945 (acid-free paper)
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111 |
2 |
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|a International Conference on Ion Implantation Technology
|n (10th :
|d 1994 :
|c Catania, Italy)
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700 |
1 |
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|a Coffa, S.
|
080 |
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|a 621.382:061.3
|
650 |
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0 |
|a Semiconductors
|v Congresses.
|
650 |
# |
0 |
|a Ion implantation
|v Congresses.
|
650 |
# |
0 |
|a Semiconductor doping
|v Congresses.
|
010 |
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|a ###95175281#
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050 |
0 |
0 |
|a TK7871.85
|b .I57623 1994
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049 |
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|a AR5A
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504 |
# |
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|a Incluye referencias bibliográficas.
|
040 |
# |
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|a DLC
|c DLC
|d OCL
|d BAKER
|b spa
|d arbccab
|
500 |
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|a "Part 1 (pp. 1-440) reprinted from: Nuclear instruments and methods in physics research, Section B: Beam interactions with materials and atoms, vol. B96, 1-2"--t.p. verso.
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500 |
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|a Incluye índice.
|
082 |
0 |
0 |
|a 621.3815/2
|2 20
|
942 |
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|c BK
|
952 |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 008968_nuevo-0
|o NUCL. INSTRUM. METH. PHYS. RES. B 1995
|p 008968_nuevo-0
|t 1
|y BK
|