Electron beam interactions with solids for microscopy, microanalysis & microlithography /

Guardado en:
Detalles Bibliográficos
Otros Autores: Kyser, David F., Pfefferkorn Conference
Formato: Libro
Lenguaje:
Publicado: O´Hare : Scanning Electron Microscopy, c1984.
LEADER 00899nam#a22002055a#4500
008 060906s1984####ilua##########000#0#eng#d
005 20060906134539.0
001 BCCAB010714
003 AR-BCCAB
245 0 0 |a Electron beam interactions with solids for microscopy, microanalysis & microlithography /  |c edited by David F. Kyser ... [et al.] ; managing editor, Daniel Helibey. 
260 # # |a O´Hare :  |b Scanning Electron Microscopy,  |c c1984. 
300 # # |a xii, 372 p. :  |b il. 
020 # # |a 0931288304 
700 1 # |a Kyser, David F. 
711 2 # |a Pfefferkorn Conference  |n (1st :  |d 1982 :  |c Asilomar Conference Center, Monterey, CA) 
080 # # |a 537.533.35:061.3 
040 # # |a arbccab  |b spa 
500 # # |a "Proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA". 
942 # # |c BK 
952 # # |2 udc  |a ARBCCAB  |b ARBCCAB  |i 12037  |o 537.533.35:061.3 P475 1982  |p 12037  |t 1  |y BK