Semiconductors materials analysis and fabrication process control : Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992 /

Semiconductors materials analysis and fabrication process control : Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992 /

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Detalles Bibliográficos
Autor principal: Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)
Autor Corporativo: Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control
Otros Autores: Crean, G. M., ed., Stuck, R., ed., Woollam, J. A., ed., European Materials Reseach Society. Spring Meeting (1992 : Strasbourg, France)
Formato: Sin ejemplares
Lenguaje:
Publicado: Amsterdam, Netherlands : North-Holland, 1993.
Colección:Applied Surface Science 1993, v. 63, no. 1-4
Materias:
Semiconductor materials
Technology > Congresses.
Materials testing
Ensayo de materiales
Congresos.
Materiales semiconductores
Descripción
Notas:En cubierta: Complete Volume.
"This volume, 'Semiconductors materials analysis and fabrication process control' contains the proceedings of Symposium D of the Spring Meeting of the European Materials Reseach Society, held in Strasbourg, France, from 2-5 june 1992, concurrently with the International Conference on Electronic Materials."--pref.
Descripción Física:xiv, 338 p. : il. ; 26 cm.
Bibliografía:Incluye referencias bibliográficas e índice.
ISSN:0169-4332 ;

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