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|a Papers presented at the joint symposium on plasma science for materials and the 4th Asia-Pacific Conference on plasma science & technology :
|b Coogee, sydney, NSW, Australia, 27-29 July 1998 /
|c Guest editors, T. Yoshida ... [et al.].
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260 |
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|a Amsterdam :
|b Elsevier,
|c 1999.
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300 |
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|a vii, 184 p.
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504 |
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|a Incluye referencias bibliográficas e índices.
|
111 |
2 |
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|a Joint symposium on plasma science for materials and the 4th Asia-Pacific Conference on plasma science & technology
|d (1998 :
|c Coogee, sydney, NSW, Australia)
|
080 |
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|a 533.9:061.3
|
650 |
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7 |
|a Plasma
|2 inist
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650 |
# |
7 |
|a Physics
|2 inist
|
650 |
# |
7 |
|a Congresos.
|2 inist
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650 |
# |
7 |
|a Congresses.
|2 inist
|
700 |
1 |
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|a Yoshida, T.,
|e ed.
|4 edt
|
490 |
1 |
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|a Thin Solid Films,
|v v. 345, no. 1
|x 0040-6090 ;
|
040 |
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|a arbccab
|b spa
|
942 |
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|c BK
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952 |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 013848_nuevo-0
|o THIN SOLID FILMS 1999
|p 013848_nuevo-0
|t 1
|y BK
|