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|a Fundamentals of microfabrication :
|b the science of miniaturization /
|c Marc J. Madou.
|
| 250 |
# |
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|a 2nd ed.
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| 260 |
# |
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|a Boca Raton :
|b CRC Press,
|c c2002.
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| 300 |
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|a 723 p. :
|b col. il. ;
|c 29 cm.
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| 504 |
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|a Incluye referencias bibliográficas e índices.
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| 020 |
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|a 0849308267 (alk. paper)
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| 100 |
1 |
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|a Madou, Marc J.
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| 080 |
# |
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|a 621.3.04
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| 650 |
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|a Microelectronics.
|
| 650 |
# |
0 |
|a Integrated circuits
|x Design and construction.
|
| 650 |
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0 |
|a Microelectromechanical systems
|x Design and construction.
|
| 650 |
# |
0 |
|a Machining.
|
| 650 |
# |
0 |
|a Microelectronic packaging.
|
| 650 |
# |
0 |
|a Lasers
|x Industrial applications.
|
| 010 |
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|a ##2001043273
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|a TK7836
|b .M33 2002
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|a DLC
|c DLC
|d DLC
|b spa
|d arbccab
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| 856 |
4 |
2 |
|3 Reseña
|u http://www.loc.gov/catdir/enhancements/fy0646/2001043273-d.html
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| 082 |
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|a 621.3815/2
|2 21
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| 942 |
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|c BK
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|2 udc
|a ARBCCAB
|b ARBCCAB
|i 21216
|o 621.3.04 M183 Ed.2
|p 21216
|t 1
|y BK
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