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| LEADER |
01269cam#a2200265#a#4500 |
| 001 |
BCCAB000123 |
| 008 |
790524s1978####nyua###f#b####101#0#eng## |
| 005 |
20100902163851.0 |
| 003 |
AR-BCCAB |
| 245 |
0 |
0 |
|a Proceedings of the AVS Symposium on Ion Implantation :
|b New Prospects from Materials Modification, 14 June 1978, T. J. Watson Research Center, Yorktown Heights, New York /
|c special editor for the proceedings, W.L. Brown.
|
| 260 |
# |
# |
|a New York :
|b Published for the American Vacuum Society by the American Institute of Physics,
|c 1978.
|
| 300 |
# |
# |
|a p. 1629-1685 :
|b il. ;
|c 30 cm.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas e índice.
|
| 490 |
0 |
# |
|a Journal of Vacuum Science and Technology ;
|v 5 (1978)
|
| 020 |
# |
# |
|a 0883182467
|
| 111 |
2 |
# |
|a AVS Symposium on Ion Implantation--New Prospects for Materials Modification
|d (1978 :
|c Yorktown Heights, N.Y.)
|
| 700 |
1 |
# |
|a Brown, Walter Lyons,
|d 1924-
|4 edt
|
| 710 |
2 |
# |
|a American Vacuum Society.
|
| 650 |
# |
0 |
|a Ion implantation
|v Congresses.
|
| 650 |
# |
0 |
|a Materials
|v Congresses.
|
| 650 |
# |
7 |
|a Implantacion de iones.
|2 inist
|
| 650 |
# |
7 |
|a Congresos.
|2 inist
|
| 040 |
# |
# |
|a DLC
|c DLC
|d DLC
|b spa
|d arbccab
|
| 942 |
# |
# |
|c BK
|
| 952 |
# |
# |
|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 000123_nuevo-0
|o J. VAC. SCI. TECHNOL. 1978
|p 000123_nuevo-0
|t 1
|y BK
|
