Proceedings of the AVS Symposium on Ion Implantation : New Prospects from Materials Modification, 14 June 1978, T. J. Watson Research Center, Yorktown Heights, New York /
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| Formato: | Sin ejemplares |
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New York :
Published for the American Vacuum Society by the American Institute of Physics,
1978.
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| Colección: | Journal of Vacuum Science and Technology ;
5 (1978) |
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