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|a Silicon device processing ;
|b proceedings /
|c Charles P. Marsden, editor.
|
| 260 |
# |
# |
|a Washington :
|b U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off.,
|c 1970.
|
| 300 |
# |
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|a x, 457 p. :
|b il. ;
|c 27 cm.
|
| 490 |
1 |
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|a NBS special publication ;
|v 337
|
| 504 |
# |
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|a Incluye referencias bibliográficas.
|
| 111 |
2 |
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|a Symposium on Silicon Device Processing
|d (1970 :
|c Gaithersburg, Md.)
|
| 700 |
1 |
# |
|a Marsden, Charles P.,
|e ed.
|
| 710 |
2 |
# |
|a American Society for Testing and Materials.
|b Committee F-1 on Materials for Electron Devices and Microelectronics.
|
| 810 |
1 |
# |
|a United States.
|b National Bureau of Standards.
|t Special publication
|v 337.
|
| 086 |
# |
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|a C 13.10:337
|
| 650 |
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0 |
|a Silicon
|v Congresses.
|
| 010 |
# |
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|a ###74608543#
|
| 029 |
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|a NLGGC
|b 780563670
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| 050 |
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|a QC100
|b .U57 no. 337
|
| 049 |
# |
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|a AR5A
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| 040 |
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|a DLC
|c DLC
|d OCL
|d DNU
|d OCLCQ
|b spa
|d arbccab
|
| 500 |
# |
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|a "A United States Department of Commerce publication."
|
| 500 |
# |
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|a "CODEN: XNBSA."
|
| 500 |
# |
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|a "Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards."
|
| 082 |
0 |
0 |
|a 621.3815/2
|2 19
|
| 942 |
# |
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|c BK
|
| 952 |
# |
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|2 udc
|a ARBCCAB
|b ARBCCAB
|i 3194
|o 621.382:061.3 S68 1970
|p 3194
|t 1
|y BK
|
