Silicon device processing ; proceedings /

Silicon device processing ; proceedings /

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Detalles Bibliográficos
Autor principal:	Symposium on Silicon Device Processing (1970 : Gaithersburg, Md.)
Autor Corporativo:	Symposium on Silicon Device Processing
Otros Autores:	Marsden, Charles P., ed., American Society for Testing and Materials. Committee F-1 on Materials for Electron Devices and Microelectronics.
Formato:	Libro
Lenguaje:
Publicado:	Washington : U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1970.
Colección:	NBS special publication ; 337
Materias:	Silicon > Congresses.

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