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821006s1982####nyua#####b####101#0#eng## |
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|a Thin films and interfaces :
|b proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A. /
|c editors, P.S. Ho, K.N. Tu.
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| 260 |
# |
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|a New York :
|b North-Holland,
|c c1982.
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| 300 |
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|a ix, 434 p. :
|b il. ;
|c 24 cm.
|
| 505 |
0 |
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|a Metal-semiconductor interfaces -- Silicide-si interfaces -- Interface analysis and characterization -- Interface-related thin film studies -- Thin film applications in microelectronics I -- Thin film applications in microelectronics II
|
| 020 |
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|a 0444007741
|
| 700 |
1 |
# |
|a Ho, P. S.
|
| 700 |
1 |
# |
|a Tu, K. N.
|q (King-ning),
|d 1937-
|
| 710 |
2 |
# |
|a Materials Research Society.
|b Meeting
|d (1981 :
|c Boston, Mass.)
|
| 650 |
# |
0 |
|a Thin films
|x Surfaces
|v Congresses.
|
| 650 |
# |
0 |
|a Semiconductor films
|v Congresses.
|
| 650 |
# |
0 |
|a Surface chemistry
|v Congresses.
|
| 653 |
# |
# |
|a Thin films
|a Interactions
|
| 010 |
# |
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|a ###82018384#
|
| 019 |
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|a 16593761
|
| 029 |
# |
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|a UKM
|b b8318209
|
| 029 |
# |
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|a NLGGC
|b 823024458
|
| 050 |
0 |
# |
|a QC176.84.S93
|b T47 1982
|
| 049 |
# |
# |
|a AR5A
|
| 490 |
1 |
# |
|a Materials Research Society symposia proceedings ;
|v v. 10
|
| 504 |
# |
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|a Incluye referencias bibliográficas.
|
| 040 |
# |
# |
|a DLC
|c DLC
|d UKM
|d OCL
|d CIT
|d BAKER
|b spa
|d arbccab
|
| 500 |
# |
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|a 2 ejs.
|
| 500 |
# |
# |
|a Incluye índice.
|
| 082 |
0 |
# |
|a 530.4/1
|2 19
|
| 942 |
# |
# |
|c BK
|
| 952 |
# |
# |
|2 udc
|a ARBCCAB
|b ARBCCAB
|i 11829
|o 539.23:061.3 M417 1981
|p 11829
|t 1
|y BK
|
| 952 |
# |
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|2 udc
|a ARBCCAB
|b ARBCCAB
|i 11905
|o 539.23:061.3 M417 1981 Ej.2
|p 11905
|t 2
|y BK
|
