Thin films and interfaces : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A. /
Guardado en:
| Otros Autores: | , , |
|---|---|
| Formato: | Libro |
| Lenguaje: | |
| Publicado: |
New York :
North-Holland,
c1982.
|
| Colección: | Materials Research Society symposia proceedings ;
v. 10 |
| Materias: |
Tabla de Contenidos:
- Metal-semiconductor interfaces
- Silicide-si interfaces
- Interface analysis and characterization
- Interface-related thin film studies
- Thin film applications in microelectronics I
- Thin film applications in microelectronics II
