Microprocesses & Nanotechnology /

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Detalles Bibliográficos
Autor principal:	International Microprocesses and Nanotechnology Conference (11th : 1998 : Kyougju, Korea)
Autor Corporativo:	International Microprocesses and Nanotechnology Conference
Formato:	Sin ejemplares
Lenguaje:
Publicado:	Kyougju : Japan Society of Applied Physics, 1998.
Colección:	Japanese Journal of Applied Physics ; Pt. 1, 37, 12B, 1998
Materias:	Microelectromechanical systems > Design and construction > Congresses. Micromachines > Conception et construction > Congrès. Nanotechnology > Congresses. Nanotechnologie > Congrès. Microtechnology > Congresses. Microtechnologie > Congrès. Microfabrication > Congresses. Microfabrication > Congrès. Microlithography > Congresses. Microlithographie > Congrès.

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