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| 245 |
1 |
0 |
|a Microprocesses & Nanotechnology /
|c Y. Aoyagi ... [et al.].
|
| 260 |
# |
# |
|a Kyougju :
|b Japan Society of Applied Physics,
|c 1998.
|
| 111 |
2 |
# |
|a International Microprocesses and Nanotechnology Conference
|n (11th :
|d 1998 :
|c Kyougju, Korea)
|
| 080 |
# |
# |
|a 621.38:061.3
|
| 650 |
# |
0 |
|a Microelectromechanical systems
|x Design and construction
|v Congresses.
|
| 650 |
# |
6 |
|a Micromachines
|x Conception et construction
|v Congrès.
|
| 650 |
# |
0 |
|a Nanotechnology
|v Congresses.
|
| 650 |
# |
6 |
|a Nanotechnologie
|v Congrès.
|
| 650 |
# |
0 |
|a Microtechnology
|v Congresses.
|
| 650 |
# |
6 |
|a Microtechnologie
|v Congrès.
|
| 650 |
# |
0 |
|a Microfabrication
|v Congresses.
|
| 650 |
# |
6 |
|a Microfabrication
|v Congrès.
|
| 650 |
# |
0 |
|a Microlithography
|v Congresses.
|
| 650 |
# |
6 |
|a Microlithographie
|v Congrès.
|
| 049 |
# |
# |
|a AR5A
|
| 490 |
1 |
# |
|a Japanese Journal of Applied Physics ;
|v Pt. 1, 37, 12B, 1998
|
| 040 |
# |
# |
|a MUQ
|b spa
|c MUQ
|d arbccab
|
| 942 |
# |
# |
|c BK
|
| 952 |
# |
# |
|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 007512_nuevo-0
|o JPN. J. APPL. PHYS. 1998
|p 007512_nuevo-0
|t 1
|y BK
|
