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| LEADER |
01169cam#a2200229ua#4500 |
| 008 |
870808s1987####ne#a#####b####101#0#eng#d |
| 005 |
20060731105536.0 |
| 001 |
BCCAB008857 |
| 003 |
AR-BCCAB |
| 245 |
1 |
0 |
|a Ion implantation technology :
|b proceedings of the Sixth International Conference on Ion Implantation Technology, University of California, Berkeley, CA, USA, July 28-August 1, 1986 /
|c editors, M.I. Current ... [et al.].
|
| 260 |
# |
# |
|a Amsterdam :
|b North-Holland,
|c 1987.
|
| 300 |
# |
# |
|a xiv p., p. 83-653 :
|b il. ;
|c 27 cm.
|
| 490 |
1 |
# |
|a Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms,
|x 0168-583X ;
|v v. B21, nos. 2-4 (Mar. 1987)
|
| 111 |
2 |
# |
|a International Conference on Ion Implantation Technology
|n (6th :
|d 1986 :
|c University of California, Berkeley)
|
| 700 |
1 |
# |
|a Current, Michael I.
|
| 080 |
# |
# |
|a 621.382:061.3
|
| 650 |
# |
0 |
|a Ion implantation
|v Congresses.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas.
|
| 040 |
# |
# |
|a CLU
|c CLU
|d OCL
|b spa
|d arbccab
|
| 500 |
# |
# |
|a Incluye indices.
|
| 942 |
# |
# |
|c BK
|
| 952 |
# |
# |
|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 008857_nuevo-0
|o NUCL. INSTRUM. METH. PHYS. RES. B 1987
|p 008857_nuevo-0
|t 1
|y BK
|
