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|a New trends in ion beam processing from ions and cluster ion beams to engineering issues :
|b proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22-26, 1995 /
|c editors, P.L.F. Hemment, J.-P. Thomas.
|
260 |
# |
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|a Amsterdam :
|b North-Holland,
|c 1996.
|
300 |
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|a xv, 355 p. :
|b il. ;
|c 27 cm.
|
111 |
2 |
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|a Symposium J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation
|d (1995 :
|c Strasbourg, France)
|
700 |
1 |
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|a Hemment, P. L. F.
|q (Peter L. F.)
|
700 |
1 |
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|a Thomas, J.-P.
|
711 |
2 |
# |
|a Symposium C on Pushing the Limits of Ion Beam Processing-from Engineering to Atomic Scale Issues
|d (1995 :
|c Strasbourg, France)
|
246 |
1 |
4 |
|a Proceedings of the E-MRS '95 Symp. J + C on New Trends in Ion Beam Processing From Ions and Cluster Ion Beams to Engineering Issues, Strasbourg, France, May 22-26, 1995.
|
080 |
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|a 537.533:061.3
|
080 |
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|a 539.184
|
080 |
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|a 538.971
|
650 |
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0 |
|a Ions
|v Congresses.
|
650 |
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0 |
|a Ion bombardment
|v Congresses.
|
490 |
1 |
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|a Nuclear instruments & methods in physics research. Section B
|v v. 112
|x 0168-583X ;
|
040 |
# |
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|a GZM
|c GZM
|d OCL
|d OCLCQ
|b spa
|d arbccab
|
500 |
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|a Incluye índice.
|
942 |
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|c BK
|
952 |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 008906_nuevo-0
|o NUCL. INSTRUM. METH. PHYS. RES. B 1996
|p 008906_nuevo-0
|t 1
|y BK
|