New trends in ion beam processing from ions and cluster ion beams to engineering issues : proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22-26, 1995 /

New trends in ion beam processing from ions and cluster ion beams to engineering issues : proceedings of the E-MRS '95 Spring Meeting Symp. J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symp. C on Pushing the Limits of Ion Beam Processing - From Engineering to Atomic Scale Issues, Strasbourg, France, May 22-26, 1995 /

Guardado en:

Detalles Bibliográficos
Autor principal:	Symposium J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation (1995 : Strasbourg, France)
Autor Corporativo:	Symposium J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation
Otros Autores:	Hemment, P. L. F., Thomas, J.-P., Symposium C on Pushing the Limits of Ion Beam Processing-from Engineering to Atomic Scale Issues
Formato:	Sin ejemplares
Lenguaje:
Publicado:	Amsterdam : North-Holland, 1996.
Colección:	Nuclear instruments & methods in physics research. Section B v. 112
Materias:	Ions > Congresses. Ion bombardment > Congresses.

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