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|a Ion implantation in semiconductors and other materials ;
|b [proceedings] /
|c Edited by Billy L. Crowder.
|
260 |
# |
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|a New York :
|b Plenum Press,
|c [1973]
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300 |
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|a xii, 657 p. :
|b il. ;
|c 26 cm.
|
504 |
# |
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|a Incluye referencias bibliográficas.
|
020 |
# |
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|a 0306307561
|
111 |
2 |
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|a International Conference on Ion Implantation in Semiconductors and Other Materials,
|b 3d,
|c Yorktown Heights, N.Y.,
|d 1972.
|
700 |
1 |
# |
|a Crowder, Billy L.,
|e ed.
|
650 |
# |
0 |
|a Ion implantation
|v Congresses.
|
650 |
# |
0 |
|a Semiconductors
|v Congresses.
|
490 |
1 |
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|a The IBM research symposia series
|
040 |
# |
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|a DLC
|c DLC
|d DLC
|b spa
|d arbccab
|
500 |
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|a 2 ejs.
|
082 |
0 |
0 |
|a 537.6/22
|
942 |
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|c BK
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952 |
# |
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|2 udc
|a ARBCCAB
|b ARBCCAB
|i 4448
|o 621.382:061.3 I8 1972
|p 4448
|t 1
|y BK
|
952 |
# |
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|2 udc
|a ARBCCAB
|b ARBCCAB
|i 4449
|o 621.382:061.3 I8 1972 Ej.2
|p 4449
|t 2
|y BK
|