MEMS and MOEMS technology and applications /

MEMS and MOEMS technology and applications /

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Detalles Bibliográficos
Otros Autores:	Rai-Choudhury, P.
Formato:	Libro
Lenguaje:
Publicado:	Bellingham, Wash. : SPIE Optical Engineering Press, c2000.
Materias:	Microelectromechanical systems. Optoelectronic devices.
Acceso en línea:	Indice

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