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AR-BCCAB |
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|a Introduction to microelectromechanical systems engineering /
|c Nadim Maluf, Kirt Williams.
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| 250 |
# |
# |
|a 2nd ed.
|
| 260 |
# |
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|a Boston :
|b Artech House,
|c 2004.
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| 300 |
# |
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|a xx, 283 p. :
|b il. ;
|c 26 cm.
|
| 490 |
0 |
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|a Microelectromechanical systems series
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| 504 |
# |
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|a Incluye referencias bibliográficas e índice.
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|a 1580535909 (alk. paper)
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|a Maluf, Nadim.
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|a Williams, Kirt.
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|a Microelectromechanical systems.
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|a ##2004050669
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|a TK7875
|b .M35 2004
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|a DLC
|b spa
|d arbccab
|c DLC
|d DLC
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|a 621.381
|2 22
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|c BK
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|2 udc
|a ARBCCAB
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|d 20100716
|e Blackwell
|g U$S108.39
|i 21223
|o 621.36:620.3 M29 Ed.2
|p 21223
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|y BK
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