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820726s1982####nyua##########100#0#eng## |
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|a Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York /
|c special editors for the proceesings, Roger Kelly and J.J. Cuomo ; program committee, J.J. Cuomo ... [et al.] ; workshop aids, V.A. Fastiggi, R.J. Cuomo, and S.M. Kelly.
|
| 260 |
# |
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|a New York :
|b American Institute of Physics,
|c 1982.
|
| 300 |
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|a p. 725-815 :
|b il. ;
|c 29 cm.
|
| 020 |
# |
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|a 0883184052
|
| 700 |
1 |
# |
|a Kelly, Roger.
|
| 700 |
1 |
# |
|a Cuomo, J. J.
|
| 080 |
# |
# |
|a 537.534:061.3
|
| 080 |
# |
# |
|a 533.9:061.3
|
| 650 |
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0 |
|a Plasma engineering
|v Congresses.
|
| 650 |
# |
0 |
|a Sputtering (Physics)
|v Congresses.
|
| 650 |
# |
0 |
|a Ion implantation
|v Congresses.
|
| 490 |
1 |
# |
|a Journal of vacuum science and technology ;
|v v. 21, no. 3
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas.
|
| 040 |
# |
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|a DLC
|c DLC
|d OCL
|b spa
|d arbccab
|
| 500 |
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|a Incluye índice.
|
| 942 |
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|c BK
|
| 952 |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 008294_nuevo-0
|o J. VAC. SCI. TECHNOL. 1982
|p 008294_nuevo-0
|t 1
|y BK
|
