Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York /
Guardado en:
| Otros Autores: | , |
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| Formato: | Sin ejemplares |
| Lenguaje: | |
| Publicado: |
New York :
American Institute of Physics,
1982.
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| Colección: | Journal of vacuum science and technology ;
v. 21, no. 3 |
| Materias: |
