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01347cam#a2200277ua#4500 |
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20060725100908.0 |
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840402s1983####nyua#####b####101#0#eng#d |
| 001 |
BCCAB008299 |
| 003 |
AR-BCCAB |
| 245 |
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|a Proceedings of the Tenth Annual Conference on the Physics and Chemistry of Semiconductor Interfaces, 25-27 January 1983, Sweeney Convention Center, Santa Fe, New Mexico /
|c sponsored by the American Physical Society ... [et al.] ; special editor for the proceedings: Robert S. Bauer.
|
| 260 |
# |
# |
|a New York :
|b American Institute of Physics,
|c 1983.
|
| 300 |
# |
# |
|a p. 519-859 :
|b il. ;
|c 30 cm.
|
| 111 |
2 |
# |
|a Conference on the Physics and Chemistry of Semiconductor Interfaces
|n (10th :
|d 1983 :
|c Santa Fe, NM)
|
| 700 |
1 |
# |
|a Bauer, Robert S.
|
| 710 |
2 |
# |
|a American Physical Society.
|
| 710 |
2 |
# |
|a American Vacuum Society.
|
| 650 |
# |
0 |
|a Semiconductors
|v Congresses.
|
| 650 |
# |
0 |
|a Surfaces (Physics)
|v Congresses.
|
| 650 |
# |
0 |
|a Surface chemistry
|v Congresses.
|
| 049 |
# |
# |
|a AR5A
|
| 490 |
1 |
# |
|a Journal of vacuum science & technology. B, Microelectronics processing and phenomena,
|v v. 1, no. 3
|x 0734-211X ;
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas.
|
| 040 |
# |
# |
|a MNU
|c MNU
|d OCL
|b spa
|d arbccab
|
| 500 |
# |
# |
|a Incluye índice.
|
| 942 |
# |
# |
|c BK
|
| 952 |
# |
# |
|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 008299_nuevo-0
|o J. VAC. SCI. TECHNOL. 1983
|p 008299_nuevo-0
|t 1
|y BK
|
