Proceedings of the Tenth Annual Conference on the Physics and Chemistry of Semiconductor Interfaces, 25-27 January 1983, Sweeney Convention Center, Santa Fe, New Mexico /
Guardado en:
Autor principal: | Conference on the Physics and Chemistry of Semiconductor Interfaces (10th : 1983 : Santa Fe, NM) |
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Autor Corporativo: | Conference on the Physics and Chemistry of Semiconductor Interfaces |
Otros Autores: | Bauer, Robert S., American Physical Society., American Vacuum Society. |
Formato: | Sin ejemplares |
Lenguaje: | |
Publicado: |
New York :
American Institute of Physics,
1983.
|
Colección: | Journal of vacuum science & technology. B, Microelectronics processing and phenomena,
v. 1, no. 3 |
Materias: |
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