Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June 1998 /

Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June 1998 /

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Detalles Bibliográficos
Autor principal:	Symposium J on Ion Implantation into Semiconductors, Oxides, and Ceramics (1998 : Strasbourg, France)
Autor Corporativo:	Symposium J on Ion Implantation into Semiconductors, Oxides, and Ceramics
Otros Autores:	Lindner, Jorg K. N., Council of Europe., European Commission., European Materials Research Society., E-MRS Spring Meeting
Formato:	Sin ejemplares
Lenguaje:	Inglés
Publicado:	Amsterdam : North-Holland, 1999.
Colección:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, v. 147, no. 1/4

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