Fundamentals of nanoscale film analysis /

From materials science to integrated circuit development, much of modern technology is moving from the microscale toward the nanoscale. This book focuses on the fundamental physics underlying innovative techniques for analyzing surfaces and near-surfaces. New analytical techniques have emerged to me...

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Detalles Bibliográficos
Autor principal: Alford, Terry L.
Otros Autores: Feldman, Leonard C., Mayer, James W., 1930-
Formato: Libro
Lenguaje:Inglés
Publicado: New York, N.Y. ; London : Springer, c2007.
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Acceso en línea:Tapa
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