Selected papers revised from the Proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) : 16-18 June 1999, Kanazawa, Japan, organized by Executive Committee of the International Symposium on Sputtering & Plasma Processes; sponsored by the Japan Society of Applied Physics /
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Otros Autores: | , , , |
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Formato: | Sin ejemplares |
Lenguaje: | |
Publicado: |
[Oxford, England] :
Pergamon,
c2000.
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Materias: |
Notas: | Issued as: Vacuum, v. 59, no. 2-3 (Nov.-Dec. 2000). "Special issue." En portada: Guest Editors: T. Hata, H. Biederman. |
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Descripción Física: | p. 381-843 : il. ; 26 cm. |
Bibliografía: | Incluye referencias bibliográficas. |