Selected papers revised from the Proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) : 16-18 June 1999, Kanazawa, Japan, organized by Executive Committee of the International Symposium on Sputtering & Plasma Processes; sponsored by the Japan Society of Applied Physics /

Selected papers revised from the Proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) : 16-18 June 1999, Kanazawa, Japan, organized by Executive Committee of the International Symposium on Sputtering & Plasma Processes; sponsored by the Japan Society of Applied Physics /

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Detalles Bibliográficos
Otros Autores: Kinbara, Akira., Hata, H., ed., Biederman, H., ed., International Symposium on Sputtering and Plasma Processes
Formato: Sin ejemplares
Lenguaje:Inglés
Publicado: [Oxford, England] : Pergamon, c2000.
Materias:
Sputtering (Physics) > Congresses.
Plasma (Ionized gases) > Congresses.
Descripción
Notas:Issued as: Vacuum, v. 59, no. 2-3 (Nov.-Dec. 2000).
"Special issue."
En portada: Guest Editors: T. Hata, H. Biederman.
Descripción Física:p. 381-843 : il. ; 26 cm.
Bibliografía:Incluye referencias bibliográficas.

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