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|a Selected papers revised from the Proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) :
|b 16-18 June 1999, Kanazawa, Japan, organized by Executive Committee of the International Symposium on Sputtering & Plasma Processes; sponsored by the Japan Society of Applied Physics /
|c [guest editors, A. Kinbara ... et. al.].
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| 260 |
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|a [Oxford, England] :
|b Pergamon,
|c c2000.
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|a p. 381-843 :
|b il. ;
|c 26 cm.
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|a Incluye referencias bibliográficas.
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|a International Symposium on Sputtering and Plasma Processes
|n (5th :
|d 1999 :
|c Kanazawa-shi, Japan)
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| 730 |
0 |
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|a Vacuum.
|n Vol. 59, no. 2-3.
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| 246 |
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|a Proceedings of the Fifth International Symposium on Sputtering and Plasma Processes
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| 246 |
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|a Proceedings of the 5th International Symposium on Sputtering and Plasma Processes
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| 246 |
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|a ISSP '99
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| 650 |
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|a Sputtering (Physics)
|v Congresses.
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| 650 |
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|a Plasma (Ionized gases)
|v Congresses.
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| 049 |
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|a AR5A
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| 700 |
1 |
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|a Kinbara, Akira.
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| 700 |
1 |
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|a Hata, H.,
|e ed.
|4 edt
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| 700 |
1 |
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|a Biederman, H.,
|e ed.
|4 edt
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| 040 |
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|a HNK
|c HNK
|d OCLCQ
|b spa
|d arbccab
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| 500 |
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|a Issued as: Vacuum, v. 59, no. 2-3 (Nov.-Dec. 2000).
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| 500 |
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|a "Special issue."
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| 500 |
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|a En portada: Guest Editors: T. Hata, H. Biederman.
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| 942 |
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|c BK
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 007992_nuevo-0
|o VACUUM 2000
|p 007992_nuevo-0
|t 1
|y BK
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