Selected papers revised from the Proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) : 16-18 June 1999, Kanazawa, Japan, organized by Executive Committee of the International Symposium on Sputtering & Plasma Processes; sponsored by the Japan Society of Applied Physics /
Guardado en:
Otros Autores: | Kinbara, Akira., Hata, H., ed., Biederman, H., ed., International Symposium on Sputtering and Plasma Processes |
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Formato: | Sin ejemplares |
Lenguaje: | |
Publicado: |
[Oxford, England] :
Pergamon,
c2000.
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Materias: |
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