Detalles Bibliográficos
Autor principal: |
International Symposium on Electron, Ion, and Photon Beams (30th : 1986 : Boston, Mass.) |
Autor Corporativo: |
International Symposium on Electron, Ion, and Photon Beams |
Otros Autores: |
Neureuther, Andrew R.,
American Vacuum Society.,
Institute of Electrical and Electronics Engineers. Electron Devices Group. |
Formato: | Sin ejemplares
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Lenguaje: | |
Publicado: |
New York :
American Institute of Physics,
1987.
|
Colección: | Journal of Vacuum Science and Technology B ;
v. 5, no. 1
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Materias: |
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