Detalles Bibliográficos
| Autor principal: |
International Symposium on Electron, Ion, and Photon Beams (30th : 1986 : Boston, Mass.) |
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| Autor Corporativo: |
International Symposium on Electron, Ion, and Photon Beams |
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| Otros Autores: |
Neureuther, Andrew R.,
American Vacuum Society.,
Institute of Electrical and Electronics Engineers. Electron Devices Group. |
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| Formato: | Sin ejemplares
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| Lenguaje: | Inglés |
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| Publicado: |
New York :
American Institute of Physics,
1987.
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| Colección: | Journal of Vacuum Science and Technology B ;
v. 5, no. 1
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| Materias: |
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