Ion implantation equipment and techniques : proceedings of the third International Conference on Ion Implantation Equipment and Techniques, Queen's University, Kingston, Ontario, 8-ll July 1980 /

Ion implantation equipment and techniques : proceedings of the third International Conference on Ion Implantation Equipment and Techniques, Queen's University, Kingston, Ontario, 8-ll July 1980 /

Guardado en:
Detalles Bibliográficos
Autor principal: International Conference on Ion Implantation: Equipment and Techniques (3rd : 1980 : Kingston, Ont.)
Autor Corporativo: International Conference on Ion Implantation: Equipment and Techniques
Otros Autores: McKenna, Charles M., Scanlon, Patrick J., Winnard, James R.
Formato: Sin ejemplares
Lenguaje:
Publicado: Amsterdam : North-Holland, 1981.
Colección:Nuclear instruments & methods in physics research, v. 189, no. 1
Materias:
Ion implantation > Equipment and supplies > Congresses.
Ion implantation > Technique > Congresses.
Descripción
Descripción Física:xii, 339 p. : il. ; 27 cm.
Bibliografía:Incluye referencias bibliográficas.
ISSN:0029-554X ;

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