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811030s1981####ne#######b####100#0#eng#d |
| 005 |
20060731104553.0 |
| 001 |
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|a Ion implantation equipment and techniques :
|b proceedings of the third International Conference on Ion Implantation Equipment and Techniques, Queen's University, Kingston, Ontario, 8-ll July 1980 /
|c editors, Charles M. McKenna, Patrick J. Scanlon, James R. Winnard.
|
| 260 |
# |
# |
|a Amsterdam :
|b North-Holland,
|c 1981.
|
| 300 |
# |
# |
|a xii, 339 p. :
|b il. ;
|c 27 cm.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas.
|
| 111 |
2 |
# |
|a International Conference on Ion Implantation: Equipment and Techniques
|n (3rd :
|d 1980 :
|c Kingston, Ont.)
|
| 700 |
1 |
# |
|a McKenna, Charles M.
|
| 700 |
1 |
# |
|a Scanlon, Patrick J.
|
| 700 |
1 |
# |
|a Winnard, James R.
|
| 080 |
# |
# |
|a 621.382:061.3
|
| 650 |
# |
0 |
|a Ion implantation
|x Equipment and supplies
|v Congresses.
|
| 650 |
# |
0 |
|a Ion implantation
|x Technique
|v Congresses.
|
| 490 |
1 |
# |
|a Nuclear instruments & methods in physics research,
|v v. 189, no. 1
|x 0029-554X ;
|
| 040 |
# |
# |
|a IWA
|c IWA
|d OCL
|b spa
|d arbccab
|
| 942 |
# |
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|c BK
|
| 952 |
# |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 008846_nuevo-0
|o NUCL. INSTRUM. METH. PHYS. RES. A 1981
|p 008846_nuevo-0
|t 1
|y BK
|
