Ion implantation equipment and techniques : proceedings of the third International Conference on Ion Implantation Equipment and Techniques, Queen's University, Kingston, Ontario, 8-ll July 1980 /

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Detalles Bibliográficos
Autor principal: International Conference on Ion Implantation: Equipment and Techniques (3rd : 1980 : Kingston, Ont.)
Autor Corporativo: International Conference on Ion Implantation: Equipment and Techniques
Otros Autores: McKenna, Charles M., Scanlon, Patrick J., Winnard, James R.
Formato: Sin ejemplares
Lenguaje:
Publicado: Amsterdam : North-Holland, 1981.
Colección:Nuclear instruments & methods in physics research, v. 189, no. 1
Materias:
LEADER 01251cam#a2200253ua#4500
008 811030s1981####ne#######b####100#0#eng#d
005 20060731104553.0
001 BCCAB008846
003 AR-BCCAB
245 1 0 |a Ion implantation equipment and techniques :  |b proceedings of the third International Conference on Ion Implantation Equipment and Techniques, Queen's University, Kingston, Ontario, 8-ll July 1980 /  |c editors, Charles M. McKenna, Patrick J. Scanlon, James R. Winnard. 
260 # # |a Amsterdam :  |b North-Holland,  |c 1981. 
300 # # |a xii, 339 p. :  |b il. ;  |c 27 cm. 
504 # # |a Incluye referencias bibliográficas. 
111 2 # |a International Conference on Ion Implantation: Equipment and Techniques  |n (3rd :  |d 1980 :  |c Kingston, Ont.) 
700 1 # |a McKenna, Charles M. 
700 1 # |a Scanlon, Patrick J. 
700 1 # |a Winnard, James R. 
080 # # |a 621.382:061.3 
650 # 0 |a Ion implantation  |x Equipment and supplies  |v Congresses. 
650 # 0 |a Ion implantation  |x Technique  |v Congresses. 
490 1 # |a Nuclear instruments & methods in physics research,  |v v. 189, no. 1  |x 0029-554X ; 
040 # # |a IWA  |c IWA  |d OCL  |b spa  |d arbccab 
942 # # |c BK 
952 # # |2 udc  |7 NOT_LOAN  |a ARBCCAB  |b ARBCCAB  |i 008846_nuevo-0  |o NUCL. INSTRUM. METH. PHYS. RES. A 1981  |p 008846_nuevo-0  |t 1  |y BK