Ion implantation equipment and techniques : proceedings of the third International Conference on Ion Implantation Equipment and Techniques, Queen's University, Kingston, Ontario, 8-ll July 1980 /
Guardado en:
Autor principal: | International Conference on Ion Implantation: Equipment and Techniques (3rd : 1980 : Kingston, Ont.) |
---|---|
Autor Corporativo: | International Conference on Ion Implantation: Equipment and Techniques |
Otros Autores: | McKenna, Charles M., Scanlon, Patrick J., Winnard, James R. |
Formato: | Sin ejemplares |
Lenguaje: | |
Publicado: |
Amsterdam :
North-Holland,
1981.
|
Colección: | Nuclear instruments & methods in physics research,
v. 189, no. 1 |
Materias: |
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