Ion implantation technology : proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988 /

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Detalles Bibliográficos
Autor principal: International Conference on Ion Implantation Technology (7th : 1988 : Kyoto, Japan)
Autor Corporativo: International Conference on Ion Implantation Technology
Otros Autores: Takagi, Toshinori.
Formato: Sin ejemplares
Lenguaje:
Publicado: Amsterdam : North-Holland, 1989.
Colección:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, v. B37/38 (Feb. 1989)
Materias:
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245 1 0 |a Ion implantation technology :  |b proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988 /  |c edited under the responsibility of T. Takagi ... [et al.]. 
260 # # |a Amsterdam :  |b North-Holland,  |c 1989. 
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700 1 # |a Takagi, Toshinori. 
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