Ion implantation technology : proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988 /
Guardado en:
Autor principal: | International Conference on Ion Implantation Technology (7th : 1988 : Kyoto, Japan) |
---|---|
Autor Corporativo: | International Conference on Ion Implantation Technology |
Otros Autores: | Takagi, Toshinori. |
Formato: | Sin ejemplares |
Lenguaje: | |
Publicado: |
Amsterdam :
North-Holland,
1989.
|
Colección: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms,
v. B37/38 (Feb. 1989) |
Materias: |
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