Glow discharge processes : sputtering and plasma etching /

Glow discharge processes : sputtering and plasma etching /

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Detalles Bibliográficos
Autor principal:	Chapman, Brian N.
Formato:	Libro
Lenguaje:
Publicado:	New York : Wiley, 1980.
Materias:	Sputtering (Physics) Glow discharges. Plasma etching.
Acceso en línea:	Reseña

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