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01347nam#a22002775a#4500 |
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070213s1986####nyu###########100#0#eng#d |
| 005 |
20070213075645.0 |
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BCCAB013578 |
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AR-BCCAB |
| 245 |
1 |
0 |
|a Proceedings of the workshop on refractroy metals ans silicides for VLSI IV.
|
| 260 |
# |
# |
|a New York :
|b American Institute of Physics,
|c 1986.
|
| 300 |
# |
# |
|a xv, 1273-1578 p.
|
| 501 |
# |
# |
|a Proceedings of the 16th annual symposium of the greater New York chapter of the AVS on strained layer superlattices.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas e índice.
|
| 111 |
2 |
# |
|a Workshop on refractroy metals ans silicides for VLSI
|n (4th :
|d 1986 :
|c St. Francis Retreat Center, San Juan Bautista, California)
|
| 711 |
2 |
# |
|a Annual symposium of the greater New York chapter of the AVS on strained layer superlattices
|n (16th :
|d 1986 :
|c Exxon Research and Engineering Company, Clinton Townchip, Annandale, New Jersey)
|
| 080 |
# |
# |
|a 666.76:061.3
|
| 650 |
# |
7 |
|a Congresses.
|2 inist
|
| 650 |
# |
7 |
|a Congresos.
|2 inist
|
| 650 |
# |
7 |
|a Refractarios
|2 inist
|
| 650 |
# |
7 |
|a Refractories
|2 inist
|
| 490 |
1 |
# |
|a Journal of Vacuum Science & Technology B. Second series ;
|v v. 4, no. 6
|
| 040 |
# |
# |
|a arbccab
|b spa
|
| 500 |
# |
# |
|a Título de tapa.
|
| 942 |
# |
# |
|c BK
|
| 952 |
# |
# |
|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 013578_nuevo-0
|o J. VAC. SCI. TECHNOL. B 1986
|p 013578_nuevo-0
|t 1
|y BK
|
