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070213s1985####nyu###########100#0#eng#d |
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20070213082442.0 |
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BCCAB013586 |
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AR-BCCAB |
| 245 |
1 |
0 |
|a Proceedings of the workshop on refractory metal silicides for VLSI II.
|
| 260 |
# |
# |
|a New York :
|b American Institute of Physics,
|c 1985.
|
| 300 |
# |
# |
|a x, 1318-1580 p.
|
| 501 |
# |
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|a Proceedings of the 14th annual symposium of the New York Chapter of the AVS on coatings for large-scale metallurgical, optical and electronic applications / Special editors for the proceedings: T. D- Moustakas and H. Witzke.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas e índice.
|
| 111 |
2 |
# |
|a Workshop on refractory metal silicides for VLSI
|n (2nd :
|d 1984 :
|c St. Francis Retreat Center, San Juan Bautista, California)
|
| 711 |
2 |
# |
|a Annual symposium of the New York Chapter of the AVS on coatings for large-scale metallurgical, optical and electronic applications
|n (14th :
|d 1984 :
|c Exxon Research and engineerng company, Clinton Township, Annandale, New Jersey)
|
| 080 |
# |
# |
|a 666.76:061.3
|
| 650 |
# |
7 |
|a Congresses.
|2 inist
|
| 650 |
# |
7 |
|a Congresos.
|2 inist
|
| 650 |
# |
7 |
|a Refractories
|2 inist
|
| 650 |
# |
7 |
|a Refractarios
|2 inist
|
| 700 |
1 |
# |
|a Strathman, Michael D.,
|e ed.
|4 edt
|
| 700 |
1 |
# |
|a Moustakas, T. D.,
|e ed.
|4 edt
|
| 700 |
1 |
# |
|a Witzke, H.,
|e ed.
|4 edt
|
| 490 |
1 |
# |
|a Journal of Vacuum Science & Technology B. Second series ;
|v v. 2, no. 4
|
| 040 |
# |
# |
|a arbccab
|b spa
|
| 500 |
# |
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|a Título de tapa.
|
| 500 |
# |
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|a Special editor for the proceedings: Michael D. Strathman.
|
| 942 |
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|c BK
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| 952 |
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|2 udc
|7 NOT_LOAN
|a ARBCCAB
|b ARBCCAB
|i 013586_nuevo-0
|o J. VAC. SCI. TECHNOL. B 1984
|p 013586_nuevo-0
|t 1
|y BK
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