Proceedings of the workshop on refractory metal silicides for VLSI II.

Proceedings of the workshop on refractory metal silicides for VLSI II.

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Detalles Bibliográficos
Autor principal: Workshop on refractory metal silicides for VLSI (2nd : 1984 : St. Francis Retreat Center, San Juan Bautista, California)
Autor Corporativo: Workshop on refractory metal silicides for VLSI
Otros Autores: Strathman, Michael D., ed., Moustakas, T. D., ed., Witzke, H., ed., Annual symposium of the New York Chapter of the AVS on coatings for large-scale metallurgical, optical and electronic applications
Formato: Sin ejemplares
Lenguaje:
Publicado: New York : American Institute of Physics, 1985.
Colección:Journal of Vacuum Science & Technology B. Second series ; v. 2, no. 4
Materias:
Congresses.
Congresos.
Refractories
Refractarios

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