Selected papers revised from the proceedings of the fourth International Symposium on Sputtering and Plasma Processes, (ISSP '97) : Kanazawa, Japan, 4-6 June 1997 /

Selected papers revised from the proceedings of the fourth International Symposium on Sputtering and Plasma Processes, (ISSP '97) : Kanazawa, Japan, 4-6 June 1997 /

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Detalles Bibliográficos
Autor principal: International Symposium on Sputtering and Plasma Processes (4th : 1997 : Kanazawa-shi, Japan)
Autor Corporativo: International Symposium on Sputtering and Plasma Processes
Formato: Sin ejemplares
Lenguaje:
Colección:Vacuum, v. 51, no. 4
Descripción
Descripción Física:p. 475-795 : il. ; 28 cm.
ISSN:0042-207X ;

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