Selected papers revised from the proceedings of the fourth International Symposium on Sputtering and Plasma Processes, (ISSP '97) : Kanazawa, Japan, 4-6 June 1997 /

Selected papers revised from the proceedings of the fourth International Symposium on Sputtering and Plasma Processes, (ISSP '97) : Kanazawa, Japan, 4-6 June 1997 /

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Detalles Bibliográficos
Autor principal:	International Symposium on Sputtering and Plasma Processes (4th : 1997 : Kanazawa-shi, Japan)
Autor Corporativo:	International Symposium on Sputtering and Plasma Processes
Formato:	Sin ejemplares
Lenguaje:	Inglés
Colección:	Vacuum, v. 51, no. 4

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