Selected papers revised from the proceedings of the fourth International Symposium on Sputtering and Plasma Processes, (ISSP '97) : Kanazawa, Japan, 4-6 June 1997 /

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Detalles Bibliográficos
Autor principal: International Symposium on Sputtering and Plasma Processes (4th : 1997 : Kanazawa-shi, Japan)
Autor Corporativo: International Symposium on Sputtering and Plasma Processes
Formato: Sin ejemplares
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Colección:Vacuum, v. 51, no. 4
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245 1 0 |a Selected papers revised from the proceedings of the fourth International Symposium on Sputtering and Plasma Processes, (ISSP '97) :  |b Kanazawa, Japan, 4-6 June 1997 /  |c organized by Executive Committee of the International Symposium on Sputtering & Plasma Processes ; sponsored by the Study Committee of Sputtering of Sputtering & Plasma Processes, Japan Technology Transfer Association ; advisory board, Akira Kinbara ... [et al.] ; executive committee, Minoru Inoue [et al.]. 
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111 2 # |a International Symposium on Sputtering and Plasma Processes  |n (4th :  |d 1997 :  |c Kanazawa-shi, Japan) 
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