$Proceedings of the workshop on refractory metls and silicides for VLSI III.$

Proceedings of the workshop on refractory metls and silicides for VLSI III.

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Detalles Bibliográficos
Autor principal:	Workshop on refractory metls and silicides for VLSI (3rd : 1985 : St. Francis Retreat Center, San Juan Bautista, California)
Autor Corporativo:	Workshop on refractory metls and silicides for VLSI
Otros Autores:	Strathman, Michael D., ed.
Formato:	Sin ejemplares
Lenguaje:
Publicado:	New York : American Institute of Physics, 1986.
Colección:	Journal of Vacuum Science & Technology B. Second series ; v. 3, no. 6
Materias:	Congresses. Congresos. Refractory metals Metales refractarios

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