Selección de un sistema de barrido que permita dopar un sustrato con implantación iónica, de manera uniforme /

Selección de un sistema de barrido que permita dopar un sustrato con implantación iónica, de manera uniforme /

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Detalles Bibliográficos
Autor principal:	Arévalo, Horacio M.
Otros Autores:	Salvatelli, E. 1937-2009., Universidad Nacional de Cuyo. Instituto de Física "Dr. José A. Balseiro".
Formato:	Libro
Lenguaje:	Español
Publicado:	1974.
Materias:	Ion implantation > Theses. Implatación de iones > Theses. Barrido mecánico

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